Nuwa TCAD
Analyze the internal physical mechanisms of semiconductor devices, optimize process and device design, and improve the performance, product development efficiency, and yield of semiconductor devices.

Mesh Adjustment

GMPT, October 2024

In TCAD simulation tools, the importance of mesh division is significant, directly affecting the accuracy and stability of numerical calculations. Nuwa TCAD simulation tool offers mesh adjustment functions to help users improve simulation accuracy and stability.

Local Mesh Adjustment Function

  • The tool provides local mesh adjustment functionality, allowing users to select regions and specify the material and adjustment direction within the region for mesh refinement based on the existing mesh.

Mesh Quality Evaluation

  • Equipped with mesh quality evaluation functions, the tool assesses individual mesh quality control parameters, such as skewness ratio, minimum angle, and the ratio of the longest edge to the shortest edge.

Adaptive Mesh

  • Manual modification of adaptive rules to automatically adjust the mesh.
  • During process simulations that change the internal physical gradient, such as ion implantation and oxidation diffusion, the software automatically performs adaptive mesh adjustments.